XDD1 Diaphragm 0.5 - 15 m3/h > 1 mbar mXDS3 Dry Scroll 3 m3/h 0.1 mbar nXDS Dry Scroll 6 - 22 m3/h 0.007 mbar XDSi Dry Scroll 35 - 46 m3/h 0.01 mbar nXRi Dry Multistage Roots 30 - 120 m3/h 0.03 mbar nXLi Dry Multistage Roots 100 - 200 m3/h 0.02 mbar GV Dry Claw 80 - 390 m3/h 0.003 - 0.006 mbar
E2M0.7-2.5 Rotary Vane 0.7 - 2.5 m3/h < 3x10-3 mbar RV Rotary Vane 3 - 12 m3/h 2x10-3 mbar E2M18-28 Rotary Vane 18 - 28 m3/h < 1x10-3 mbar E2M40-80 Rotary Vane 40 - 80 m3/h < 1x10-3 mbar E2M175-275 Rotary Vane 175 - 275 m3/h < 7x10-3 mbar nES Rotary Vane 40 - 750 m3/h 0.08 mbar
nEXT Turbomolecular 47 - 1250 l/s < 5x10-10 mbar STP Turbomolecular < 4500 l/s < 1x10-10 mbar Turbo Carts Turbomolecular 47 - 400 l/s < 5x10-10 mbar nEXT Cart XL Turbomolecular 240 - 930 l/s < 1x10-10 mbar ECAL1 Turbomolecular 70 l/s < 5x10-8 mbar
Ion Getter Ion Pump 0.2 - 1200 l/s 1x10-11 mbar TSP Ion Pump > 10000 m3/h 1x10-12 mbar NEG Ion Pump 55 - 412 l/s H2 27 - 156 l/s CO Kontrolieri Controller Ion Getter Single / Multiple TSP
EPX Semiconductor 175 - 500 m3/h < 1x10-6 mbar iXL Semiconductor 110 - 930 m3/h 0.001 mbar GX Semiconductor 90 - 1000 m3/h 0.005 mbar iXH Semiconductor 100 - 1025 m3/h 0.005 mbar
